Paper Title:
Formation of Magnesium Oxide Thin Films by Reactive Sputtering
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 159-160)
Edited by
Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu
Pages
299-304
DOI
10.4028/www.scientific.net/KEM.159-160.299
Citation
K. Irie, S. Ishibashi, T. Nishimura, H. Fujii, S. Muraji, Y. Shima, H. Hasuyama, "Formation of Magnesium Oxide Thin Films by Reactive Sputtering", Key Engineering Materials, Vols. 159-160, pp. 299-304, 1999
Online since
May 1998
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Price
$32.00
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