Paper Title:
Direct Nitridation of Aluminum by Microwave-Induced-Plasma under Atmospheric Pressure
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 159-160)
Edited by
Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu
Pages
59-64
DOI
10.4028/www.scientific.net/KEM.159-160.59
Citation
K. Minehira, Y. Takao, Y. Shimizu, M. Egashira, "Direct Nitridation of Aluminum by Microwave-Induced-Plasma under Atmospheric Pressure", Key Engineering Materials, Vols. 159-160, pp. 59-64, 1999
Online since
May 1998
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Price
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