Direct Nitridation of Aluminum by Microwave-Induced-Plasma under Atmospheric Pressure |
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| Journal | Key Engineering Materials (Volumes 159 - 160) |
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| Volume | Novel Synthesis and Processing of Ceramics |
| Edited by | Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu |
| Pages | 59-64 |
| DOI | 10.4028/www.scientific.net/KEM.159-160.59 |
| Authors | K. Minehira, Y. Takao, Yasuhiro Shimizu, Makoto Egashira |
| Keywords | AlN Powder, Ar Plasma, Atmospheric Pressure, Microwave Induced Plasma, N Plasma, Nitridation of Aluminum |
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