Direct Nitridation of Aluminum by Microwave-Induced-Plasma under Atmospheric Pressure |
| Journal |
Key Engineering Materials (Volumes 159 - 160) |
| Volume |
Novel Synthesis and Processing of Ceramics |
| Edited by |
Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu |
| Pages |
59-64 |
| DOI |
10.4028/www.scientific.net/KEM.159-160.59 |
| Citation |
K. Minehira et al., 1998, Key Engineering Materials, 159-160, 59 |
| Authors |
K. Minehira, Y. Takao, Yasuhiro Shimizu, Makoto Egashira |
| Keywords |
AlN Powder, Ar Plasma, Atmospheric Pressure, Microwave Induced Plasma, N Plasma, Nitridation of Aluminum |
| Full Paper |
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