Paper Title:
Preparation on ZnO film by Atomic Layer Deposition
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 169-170)
Edited by
N. Mizutani, K. Shinozaki, N. Kamehara, T. Kimura
Pages
159-162
DOI
10.4028/www.scientific.net/KEM.169-170.159
Citation
K. Kobayashi, S. Okudaira, Y. Ishida, "Preparation on ZnO film by Atomic Layer Deposition", Key Engineering Materials, Vols. 169-170, pp. 159-162, 1999
Online since
June 1999
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Price
$32.00
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