Paper Title:
Formation of SiC Thin Films by Ion Beam Irradiation
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 169-170)
Edited by
N. Mizutani, K. Shinozaki, N. Kamehara, T. Kimura
Pages
179-182
DOI
10.4028/www.scientific.net/KEM.169-170.179
Citation
S. Hishita, K. Oyoshi, S. Suehara, T. Aizawa, "Formation of SiC Thin Films by Ion Beam Irradiation", Key Engineering Materials, Vols. 169-170, pp. 179-182, 1999
Online since
June 1999
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Price
$32.00
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