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Composition and Morphology Control of Si-C-N Powders by CVD Method

Journal Key Engineering Materials (Volumes 175 - 176)
Volume Engineering Ceramics: Multifunctional Properties
Edited by P. Sajgalík and Z. Lencés
Pages 49-56
DOI 10.4028/www.scientific.net/KEM.175-176.49
Citation Štefan Kavecký et al., 1999, Key Engineering Materials, 175-176, 49
Authors Štefan Kavecký, B. Janeková, Pavol Šajgalík
Keywords Chemical Vapour Deposition (CVD), Powder, Silicon Carbide (SiC)
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