Paper Title:
Thickness and Roughness Analysis on YSZ/Si(001) Epitaxial Films with Ultra Thin SiO2 Interface by X-Ray Reflectivity
  Abstract

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Periodical
Key Engineering Materials (Volumes 181-182)
Edited by
N. Murata, K. Shinozaki and T. Kimura
Pages
121-124
DOI
10.4028/www.scientific.net/KEM.181-182.121
Citation
C. H. Chen, N. Wakiya, A. Saiki, K. Shinozaki, N. Mizutani, "Thickness and Roughness Analysis on YSZ/Si(001) Epitaxial Films with Ultra Thin SiO2 Interface by X-Ray Reflectivity", Key Engineering Materials, Vols. 181-182, pp. 121-124, 2000
Online since
May 2000
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Price
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