Electrical Properties of SrBi2Ta2O9 (SBT) Thin Film Prepared by Metalorganic Chemical Vapor Deposition |
| Journal |
Key Engineering Materials (Volumes 181 - 182) |
| Volume |
Electroceramics in Japan III |
| Edited by |
N. Murata, K. Shinozaki and T. Kimura |
| Pages |
93-100 |
| DOI |
10.4028/www.scientific.net/KEM.181-182.93 |
| Citation |
N. Nukaga et al., 2000, Key Engineering Materials, 181-182, 93 |
| Authors |
N. Nukaga, Hiroshi Funakubo, Kunio Ishikawa, E. Shigeno, Yutaka Sawada |
| Keywords |
Chemical State, Leakage Character, MOCVD, SrBi2Ta2O9, X-Ray Photoelectron Spectroscopy (XPS) |
| Full Paper |
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