Precision Machining of Advanced Materials
Key Engineering Materials Volume 196
doi:10.4028/www.scientific.net/KEM.196
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p1
Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor
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873 K
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Authors: Hong Ho Cheng, H.Y. Tsai, Yue Long Huang
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p25
A Novel Chemical-Mechanical Planarization Technology Using Pre-Thin-Surface Grinding in ULSI Manufacturing Process
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391 K
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Authors: Junji Watanabe, R. Etoh, M. Hirano
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p31
Some Essentials of Simulating Nano-Surfacing Processes Using the Molecular Dynamics Method
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498 K
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Authors: Wun Chet Davy Cheong, Liang Chi Zhang, Hiroaki Tanaka
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p43
Assessment of the Exit Defects in Carbon Fibre-Reinforced Plastic Plates Caused by Drilling
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411 K
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Authors: Hou Jiang Zhang, Wu Yi Chen, Ding Chang Chen, Liang Chi Zhang
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p53
Grinding of Ceramics: Strength, Surface Features and Grinding Conditions
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409 K
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Authors: Tian Shu Liu, Bruno A. Latella, Liang Chi Zhang
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p61
Grinding Burn Mechanism of Directionally Solidified Superalloy
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362 K
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Authors: Ming Chen, Fang Hong Sun, Bing Yuan Xue
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p69
Wear Mechanism of Diamond Cutting Tool in Machining of Steel
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588 K
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Authors: Hiroaki Tanaka, Shoich Shimada, Naoya Ikawa, M. Yoshinaga
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p79
A Friction Model for Free-Machining Steels and Its Applicability to Machinability Analysis
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556 K
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Authors: K. Maekawa, Akihiko Kubo, T.H.C. Childs
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p91
Improvement of Friction and Wear Properties of CVD-SiC Films with New Surface Finishing Method 'ELID-Grinding'
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640 K
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Authors: T. Kato, Hitoshi Ohmori, C. Zhang, T. Yamazaki, Y. Akune, K. Hokkirigawa
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p103
A New Device of Abrasive Jet Machining and Application to Abrasive Jet Printer
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439 K
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Authors: Tsunemoto Kuriyagawa, Takashi Sakuyama, Katsuo Syoji, Hiromitsu Onodera
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p111
On-Machine Monitoring of the Wheel-Working Surface Condition with the Relative Frequency Distribution of its Profile
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461 K
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Authors: Shinji Shimizu, Haruhisa Sakamoto
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p121
On-Machine Monitoring of the Wheel Working Surface Condition with the Fractal Dimension Analysis of Its Profile
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556 K
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Authors: Haruhisa Sakamoto, Shinji Shimizu
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p133
Fabrication of Metal-Bonded Grinding/Polishing Tools by Greentape Laser Sintering Method
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432 K
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Authors: K. Maekawa, Y. Yokoyama, I. Ohshima
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p141
Abrasive Capacity of Thin Film Diamond Structures
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517 K
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Authors: Jenny Andersson, P. Hollman, S. Jacobson
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p149
Micro Hole Machining of Borosilicate Glass through Electrochemical Discharge Machining (ECDM)
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698 K
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Authors: C.T. Yang, S.S. Ho, Bo Huei Yan