Paper Title:
Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor
  Abstract

  Info
Periodical
Edited by
L. Zhang
Pages
1-24
DOI
10.4028/www.scientific.net/KEM.196.1
Citation
H. H. Cheng, H.Y. Tsai, Y. L. Huang, "Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor", Key Engineering Materials, Vol. 196, pp. 1-24, 2001
Online since
January 2001
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Price
$32.00
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