Paper Title:
A Study of the Relation between Ion Beam Etching and Chemical Etching of Aluminium Thin Films Prepared at Different Experimental Conditions
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 20-28)
Edited by
-
Pages
1071-1077
DOI
10.4028/www.scientific.net/KEM.20-28.1071
Citation
A.M. Ghander, F.M. Reicha, M.I. Youssif, "A Study of the Relation between Ion Beam Etching and Chemical Etching of Aluminium Thin Films Prepared at Different Experimental Conditions", Key Engineering Materials, Vols. 20-28, pp. 1071-1077, 1988
Online since
January 1991
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Price
$32.00
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