Paper Title:
Research on CMP Process Parameters Effect on Slurry Transport
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 202-203)
Edited by
Xipeng Xu, Jianyun Shen and Yuan Li
Pages
281-284
DOI
10.4028/www.scientific.net/KEM.202-203.281
Citation
Z.W. Shen, J. L. Yuan, B. Lin, J. J. Zheng, J. Ruan, L.B. Zhang, "Research on CMP Process Parameters Effect on Slurry Transport", Key Engineering Materials, Vols. 202-203, pp. 281-284, 2001
Online since
June 2001
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Price
$32.00
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