Experimental Research on Flow during CMP Processes |
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| Journal | Key Engineering Materials (Volumes 202 - 203) |
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| Volume | Advances in Abrasive Processes |
| Edited by | Xipeng Xu, Jianyun Shen and Yuan Li |
| Pages | 85-88 |
| DOI | 10.4028/www.scientific.net/KEM.202-203.85 |
| Authors | Ju Long Yuan, B. Lin, Z.W. Shen, Jia Jin Zheng, J. Ruan, L.B. Zhang |
| Keywords | CMP Process, Fluid Behavior, Polishing Slurry |
| Full Paper | 
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