Experimental Research on Flow during CMP Processes |
| Journal |
Key Engineering Materials (Volumes 202 - 203) |
| Volume |
Advances in Abrasive Processes |
| Edited by |
Xipeng Xu, Jianyun Shen and Yuan Li |
| Pages |
85-88 |
| DOI |
10.4028/www.scientific.net/KEM.202-203.85 |
| Citation |
Ju Long Yuan et al., 2001, Key Engineering Materials, 202-203, 85 |
| Authors |
Ju Long Yuan, Bin Lin, Z.W. Shen, Jia Jin Zheng, Jian Ruan, L.B. Zhang |
| Keywords |
CMP Process, Fluid Behavior, Polishing Slurry |
| Full Paper |
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