Paper Title:
Microstructural Differences in Silicon Nitrides with and without a Small Amount of TiN Additive
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 206-213)
Main Theme
Edited by
C. Kermel, V. Lardot, D. Libert and I. Urbain
Pages
1181-1184
DOI
10.4028/www.scientific.net/KEM.206-213.1181
Citation
R.-G. Duan, G. Roebben, C. Sarbu, J. Vleugels, O. Van der Biest, "Microstructural Differences in Silicon Nitrides with and without a Small Amount of TiN Additive", Key Engineering Materials, Vols. 206-213, pp. 1181-1184, 2002
Online since
December 2001
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Price
$32.00
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