Paper Title:
Microstructure Control of Silica Thin Film by Spin Coating Method
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 206-213)
Main Theme
Edited by
C. Kermel, V. Lardot, D. Libert and I. Urbain
Pages
2185-2188
DOI
10.4028/www.scientific.net/KEM.206-213.2185
Citation
T. Ohno, H. Suzuki, J. Takahashi, S. Shimada, T. Ota, M. Takahashi, Y. Hikichi, "Microstructure Control of Silica Thin Film by Spin Coating Method", Key Engineering Materials, Vols. 206-213, pp. 2185-2188, 2002
Online since
December 2001
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Price
$32.00
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