Paper Title:
Mechanical and Optical Properties of c-BN Films Deposited by ECR-Microwave PECVD
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 206-213)
Main Theme
Edited by
C. Kermel, V. Lardot, D. Libert and I. Urbain
Pages
471-474
DOI
10.4028/www.scientific.net/KEM.206-213.471
Citation
M.-P. Delplancke-Ogletree, M. Ye, "Mechanical and Optical Properties of c-BN Films Deposited by ECR-Microwave PECVD", Key Engineering Materials, Vols. 206-213, pp. 471-474, 2002
Online since
December 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.