Paper Title:
Effect of Tantalum Addition on Optical Transmittance and Electrical Resistivity of TiN Thin Films Prepared by d.c. Magnetron Sputtering
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 206-213)
Main Theme
Edited by
C. Kermel, V. Lardot, D. Libert and I. Urbain
Pages
523-526
DOI
10.4028/www.scientific.net/KEM.206-213.523
Citation
O. Bourbia, S. Achour, S. Zerkout, M. Benkahoul, A. Harabi, "Effect of Tantalum Addition on Optical Transmittance and Electrical Resistivity of TiN Thin Films Prepared by d.c. Magnetron Sputtering", Key Engineering Materials, Vols. 206-213, pp. 523-526, 2002
Online since
December 2001
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Price
$32.00
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