Paper Title:
Effect of Ti Source on Preparation of Pb-Based Oxide Thin Films Using LSCVD
| Periodical |
Key Engineering Materials (Volumes 214 - 215)
|
| Main Theme |
Asian Ceramic Science for Electronics I
|
| Edited by |
M. Murata, K. Koumoto and T. Takenaka, S. Fujitsu |
| Pages |
129-132 |
| DOI |
10.4028/www.scientific.net/KEM.214-215.129 |
| Citation |
Masashi Higuchi et al., 2001, Key Engineering Materials, 214-215, 129 |
| Authors |
Masashi Higuchi, Man Young Park, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani |
| Keywords |
Liquid Source, LSCVD, Metalorganic Precursor, PbTiO3, Thin Film |
| Price |
US$ 28,- |