Paper Title:
SiOx Formation Process between YSZ and Si Substrate in YSZ/Si Thin Films by In-Situ TEM Analysis
  Abstract

  Info
Periodical
Edited by
N. Murata, K. Shinozaki, S. Fujitsu and T. Kimura
Pages
153-0
DOI
10.4028/www.scientific.net/KEM.216.153
Citation
T. Kiguchi, N. Wakiya, K. Shinozaki, N. Mizutani, "SiOx Formation Process between YSZ and Si Substrate in YSZ/Si Thin Films by In-Situ TEM Analysis", Key Engineering Materials, Vol. 216, pp. 153-0, 2002
Online since
September 2001
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