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The Cyclic and Continuous Oxidation of Si3N4 with and without Aluminum Implantation

Journal Key Engineering Materials (Volumes 224 - 226)
Volume High-Performance Ceramics 2001
Edited by Jianghong Gong and Wei Pan
Pages 803-806
DOI 10.4028/www.scientific.net/KEM.224-226.803
Citation Jian Qing Wu et al., 2002, Key Engineering Materials, 224-226, 803
Authors Jian Qing Wu, Ying Jun Wang, Jian Dong Ye, Henry H. Du
Keywords Ion-Implantation, Oxidation, Thermal Cycle
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