Paper Title:
The Cyclic and Continuous Oxidation of Si3N4 with and without Aluminum Implantation
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 224-226)
Edited by
Jianghong Gong and Wei Pan
Pages
803-806
DOI
10.4028/www.scientific.net/KEM.224-226.803
Citation
J. Q. Wu, Y. J. Wang, J. D. Ye, H. H. Du, "The Cyclic and Continuous Oxidation of Si3N4 with and without Aluminum Implantation", Key Engineering Materials, Vols. 224-226, pp. 803-806, 2002
Online since
June 2002
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Price
$32.00
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