Web Based Process and Material Selection for MEMS Design and Manufacturing |
| Journal |
Key Engineering Materials (Volume 227) |
| Volume |
Modeling of Materials |
| Edited by |
C.-h. Chiu, Z. Chen, H. Gao, K.Y. Lam, A.A.O. Tay |
| Pages |
247-252 |
| DOI |
10.4028/www.scientific.net/KEM.227.247 |
| Citation |
X.F. Zha et al., 2002, Key Engineering Materials, 227, 247 |
| Authors |
X.F. Zha, Hao Du |
| Keywords |
Material Selection, Micro-Electromechanical Systems (MEMS), Modeling Tool, Process Selection, Simulation Tool, WWW |
| Full Paper |
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