Paper Title:
Web Based Process and Material Selection for MEMS Design and Manufacturing
  Abstract

  Info
Periodical
Edited by
C.-h. Chiu, Z. Chen, H. Gao, K.Y. Lam, A.A.O. Tay
Pages
247-252
DOI
10.4028/www.scientific.net/KEM.227.247
Citation
X.F. Zha, H. Du, "Web Based Process and Material Selection for MEMS Design and Manufacturing", Key Engineering Materials, Vol. 227, pp. 247-252, 2002
Online since
August 2002
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Price
$32.00
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