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Novel Methods to Measure Residual Stresses in Thin Films

Journal Key Engineering Materials (Volume 227)
Volume Modeling of Materials
Edited by C.-h. Chiu, Z. Chen, H. Gao, K.Y. Lam, A.A.O. Tay
Pages 31-40
DOI 10.4028/www.scientific.net/KEM.227.31
Citation Tong Yi Zhang, 2002, Key Engineering Materials, 227, 31
Authors Tong Yi Zhang
Keywords Indentation Fracture Tests, Microbridge Tests, Micro-Rotating-Structures, Residual Stress, Thin Film
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