Paper Title:
Site-Selective Deposition of TiO2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 228-229)
Edited by
T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki
Pages
125-130
DOI
10.4028/www.scientific.net/KEM.228-229.125
Citation
Y. Masuda, D. Wang, T. Yonezawa, K. Koumoto, "Site-Selective Deposition of TiO2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties", Key Engineering Materials, Vols. 228-229, pp. 125-130, 2002
Online since
September 2002
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Price
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