Photo-Assisted Control of Surface Morphology of Alkoxy-Derived ZrO2 Thin Films |
| Journal |
Key Engineering Materials (Volumes 228 - 229) |
| Volume |
Asian Ceramic Science for Electronics II and Electroceramics in Japan V |
| Edited by |
T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki |
| Pages |
147-154 |
| DOI |
10.4028/www.scientific.net/KEM.228-229.147 |
| Citation |
Kaori Nishizawa et al., 2002, Key Engineering Materials, 228-229, 147 |
| Authors |
Kaori Nishizawa, Takeshi Miki, Kazuyuki Suzuki, Kazumi Kato |
| Keywords |
Metal Alkoxides, Sol-Gel Method, Surface Morphology, UV-Irradiation, ZrO2 Thin Film |
| Full Paper |
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