Impact of Two-Step Growth upon In2O3(ZnO)5 Film Quality |
| Journal |
Key Engineering Materials (Volumes 228 - 229) |
| Volume |
Asian Ceramic Science for Electronics II and Electroceramics in Japan V |
| Edited by |
T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki |
| Pages |
167-172 |
| DOI |
10.4028/www.scientific.net/KEM.228-229.167 |
| Citation |
Tsuyoshi Ogino et al., 2002, Key Engineering Materials, 228-229, 167 |
| Authors |
Tsuyoshi Ogino, Naoki Ohashi, Isao Sakaguchi, Shunichi Hishita, Yutaka Adachi, Hajime Haneda |
| Keywords |
Doping, Homologous, Sputtering, Superlattice, Zinc Oxide ZnO |
| Full Paper |
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