Paper Title:
Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 228-229)
Edited by
T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki
Pages
259-262
DOI
10.4028/www.scientific.net/KEM.228-229.259
Citation
K. Yamamoto, S. Fujihara, T. Kimura, "Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors", Key Engineering Materials, Vols. 228-229, pp. 259-262, 2002
Online since
September 2002
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Price
$32.00
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