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Ferroelectricity of Epitaxial and Polycrystalline PZT Films Prepared by Pulsed-MOCVD

Journal Key Engineering Materials (Volumes 228 - 229)
Volume Asian Ceramic Science for Electronics II and Electroceramics in Japan V
Edited by T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki
Pages 69-74
DOI 10.4028/www.scientific.net/KEM.228-229.69
Citation Hiroshi Funakubo et al., 2002, Key Engineering Materials, 228-229, 69
Authors Hiroshi Funakubo, Takahiro Oikawa, Kuniharu Nagashima, Masanori Aratani, Keisuke Saito
Keywords Low Temperature Deposition, Pulsed-MOCVD, PZT
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