Paper Title:
Influence of Different Unheated Substrates on the Properties of ITO Thin Films Deposited by rf-PERTE
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Periodical
Key Engineering Materials (Volumes 230-232)
Edited by
Teresa Vieira
Pages
567-570
DOI
10.4028/www.scientific.net/KEM.230-232.567
Citation
C. Nunes de Carvalho, A.L. Luís, G. Lavareda, A. Amaral, "Influence of Different Unheated Substrates on the Properties of ITO Thin Films Deposited by rf-PERTE", Key Engineering Materials, Vols. 230-232, pp. 567-570, 2002
Online since
October 2002
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