Paper Title:
Highly Conductive/Transparent ZnO:Al Thin Films Deposited at Room Temperature by rf Magnetron Sputtering
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Periodical
Key Engineering Materials (Volumes 230-232)
Edited by
Teresa Vieira
Pages
571-574
DOI
10.4028/www.scientific.net/KEM.230-232.571
Citation
E. Fortunato, P. Nunes, A. Marques, D. Costa, H. Águas, I. Ferreira, M. E. V. Costa, R. Martins, "Highly Conductive/Transparent ZnO:Al Thin Films Deposited at Room Temperature by rf Magnetron Sputtering", Key Engineering Materials, Vols. 230-232, pp. 571-574, 2002
Online since
October 2002
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