Paper Title:
Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing
  Abstract

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Periodical
Key Engineering Materials (Volumes 230-232)
Edited by
Teresa Vieira
Pages
627-630
DOI
10.4028/www.scientific.net/KEM.230-232.627
Citation
E. Le Patézour, A. Cavaleiro, "Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing", Key Engineering Materials, Vols. 230-232, pp. 627-630, 2002
Online since
October 2002
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