Paper Title:
Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films
  Abstract

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Periodical
Key Engineering Materials (Volumes 230-232)
Edited by
Teresa Vieira
Pages
640-643
DOI
10.4028/www.scientific.net/KEM.230-232.640
Citation
L. M. S. Ferreira, C. Louro, A. Cavaleiro, B. Trindade, "Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films", Key Engineering Materials, Vols. 230-232, pp. 640-643, 2002
Online since
October 2002
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