Paper Title:
Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties
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Periodical
Key Engineering Materials (Volumes 238-239)
Edited by
Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima
Pages
153-156
DOI
10.4028/www.scientific.net/KEM.238-239.153
Citation
Y. Watanabe, S. Moriyasu, K. Katahira, W. M. Lin, H. Ohmori, A. Makinouchi, H. Tashiro, "Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties", Key Engineering Materials, Vols. 238-239, pp. 153-156, 2003
Online since
April 2003
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