Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties |
| Journal |
Key Engineering Materials (Volumes 238 - 239) |
| Volume |
Advances in Abrasive Technology V |
| Edited by |
Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima |
| Pages |
153-156 |
| DOI |
10.4028/www.scientific.net/KEM.238-239.153 |
| Citation |
Y. Watanabe et al., 2003, Key Engineering Materials, 238-239, 153 |
| Online since |
April, 2003 |
| Authors |
Y. Watanabe, Sei Moriyasu, Kazutoshi Katahira, Wei Min Lin, Hitoshi Ohmori, Akitake Makinouchi, Hirofumi Tashiro |
| Keywords |
Atomic Force Microscope (AFM), On-Machine Measurement (OMM), Shape, Surface Roughness (SR), Ultra-Precision Machining |
| Full Paper |
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