Paper Title:
Evaluation of Surfaces of Single SiC Crystal Polished with Various Kinds of Particles
  Abstract

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Periodical
Key Engineering Materials (Volumes 238-239)
Edited by
Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima
Pages
175-182
DOI
10.4028/www.scientific.net/KEM.238-239.175
Citation
J. Watanabe, M. Fujimoto, Y. Matsumoto, N. Kuroda, O. Eryu, "Evaluation of Surfaces of Single SiC Crystal Polished with Various Kinds of Particles", Key Engineering Materials, Vols. 238-239, pp. 175-182, 2003
Online since
April 2003
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Price
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