Paper Title:
A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology
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Periodical
Key Engineering Materials (Volumes 238-239)
Edited by
Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima
Pages
19-22
DOI
10.4028/www.scientific.net/KEM.238-239.19
Citation
J.W. Kim, Y. Yamagata, S. MORITA, S. Moriyasu, H. Ohmori, T. Higuchi, "A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology", Key Engineering Materials, Vols. 238-239, pp. 19-22, 2003
Online since
April 2003
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