Paper Title:
Physical and Chemical Characteristics of the Ceramic Conditioner in Chemical Mechanical Planarization
  Abstract

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Periodical
Key Engineering Materials (Volumes 238-239)
Edited by
Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima
Pages
223-228
DOI
10.4028/www.scientific.net/KEM.238-239.223
Citation
J. Y. Park, D. H. Eom, S. H. Lee, B.-Y. Myung, S. I. Lee, J. G. Park, "Physical and Chemical Characteristics of the Ceramic Conditioner in Chemical Mechanical Planarization", Key Engineering Materials, Vols. 238-239, pp. 223-228, 2003
Online since
April 2003
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Price
$32.00
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