An Analysis of the Pad Deformation for Improved Planarization |
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| Journal | Key Engineering Materials (Volumes 238 - 239) |
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| Volume | Advances in Abrasive Technology V |
| Edited by | Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima |
| Pages | 241-246 |
| DOI | 10.4028/www.scientific.net/KEM.238-239.241 |
| Citation | Thin-Lin Horng, 2003, Key Engineering Materials, 238-239, 241 |
| Online since | April, 2003 |
| Authors | Thin-Lin Horng |
| Keywords | Deformation, Material Removal Rate (MRR), Non-Uniformity, Polishing Pad |
| Full Paper | 
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