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High-Precision Low-Damage Grinding of Polycrystalline SiC

Journal Key Engineering Materials (Volumes 238 - 239)
Volume Advances in Abrasive Technology V
Edited by Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima
Pages 59-64
DOI 10.4028/www.scientific.net/KEM.238-239.59
Citation L. Yin et al., 2003, Key Engineering Materials, 238-239, 59
Online since April, 2003
Authors L. Yin, E.Y.J. Vancoille, L.C. Lee, Y.C. Liu, H. Huang, K. Ramesh
Keywords Diamond Tool, Ductile Grinding, Low-Damage, Polycrystalline SiC
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