Paper Title:
Effect of Texture and Structure of Carbon Sources on Synthesis of β-SiC Thin Film
  Abstract

  Info
Periodical
Edited by
Hiroshige Suzuki, Katsutoshi Komeya and Mototsugu Sakai
Pages
141-144
DOI
10.4028/www.scientific.net/KEM.247.141
Citation
Y. Uchiyama, N. Urase, T. Higuchi, H. Sano, "Effect of Texture and Structure of Carbon Sources on Synthesis of β-SiC Thin Film", Key Engineering Materials, Vol. 247, pp. 141-144, 2003
Online since
August 2003
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Price
$32.00
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