Paper Title:

Improvement of C-V Characteristics and Control of Interlayer Growth of Rare Earth Oxide Stabilized Zirconia Epitaxial Gate Dielectrics

Periodical Key Engineering Materials (Volume 248)
Main Theme Electroceramics in Japan VI
Edited by T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki
Pages 137-142
DOI 10.4028/www.scientific.net/KEM.248.137
Citation Takanori Kiguchi et al., 2003, Key Engineering Materials, 248, 137
Online since August, 2003
Authors Takanori Kiguchi, Kazuo Shinozaki, Naoki Wakiya, Nobuyasu Mizutani
Keywords Buffer Layer, C-V Characteristics, Gate Dielectrics, High Resolution Transmission Electron Microscopy, Ion Drift, Rare Earth Element (REE), SiO2, Zirconia
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