Paper Title:
Effect of Source Supply Method on Microstructure Development in PZT Thin Films by Pulsed Metalorganic Chemical Vapor Deposition
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Periodical
Edited by
T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki
Pages
53-56
DOI
10.4028/www.scientific.net/KEM.248.53
Citation
N. Wakiya, K. Fujito, K. Shinozaki, N. Mizutani, "Effect of Source Supply Method on Microstructure Development in PZT Thin Films by Pulsed Metalorganic Chemical Vapor Deposition", Key Engineering Materials, Vol. 248, pp. 53-56, 2003
Online since
August 2003
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