Effect of Source Supply Method on Microstructure Development in PZT Thin Films by Pulsed Metalorganic Chemical Vapor Deposition |
| Journal |
Key Engineering Materials (Volume 248) |
| Volume |
Electroceramics in Japan VI |
| Edited by |
T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki |
| Pages |
53-56 |
| DOI |
10.4028/www.scientific.net/KEM.248.53 |
| Citation |
Naoki Wakiya et al., 2003, Key Engineering Materials, 248, 53 |
| Online since |
August, 2003 |
| Authors |
Naoki Wakiya, Keisuke Fujito, Kazuo Shinozaki, Nobuyasu Mizutani |
| Keywords |
Epitaxial Growth, Metalorganic Chemical Vapor Deposition, PZT, Source-Gas Pulse Supply, Thin Film |
| Full Paper |
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