Effect of Starting Materials on Deposition Behavior, Crystal Structure and Electrical Properties of MOCVD-PZT Films |
| Journal |
Key Engineering Materials (Volume 248) |
| Volume |
Electroceramics in Japan VI |
| Edited by |
T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki |
| Pages |
57-60 |
| DOI |
10.4028/www.scientific.net/KEM.248.57 |
| Citation |
Tomohiko Ozeki et al., 2003, Key Engineering Materials, 248, 57 |
| Online since |
August, 2003 |
| Authors |
Tomohiko Ozeki, Hiroshi Funakubo |
| Keywords |
MOCVD, PZT, Starting Materials Dependency |
| Full Paper |
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