Paper Title:
A Study of the Characteristics of the Diamond Dresser in the CMP Process
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 257-258)
Edited by
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
371-376
DOI
10.4028/www.scientific.net/KEM.257-258.371
Citation
Y. S. Liao, P.W. Hong, C.T. Yang, "A Study of the Characteristics of the Diamond Dresser in the CMP Process", Key Engineering Materials, Vols. 257-258, pp. 371-376, 2004
Online since
February 2004
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Price
$32.00
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