Paper Title:
A Study on the Dressing Rate in CMP Pad Conditioning
  Abstract

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Periodical
Key Engineering Materials (Volumes 257-258)
Edited by
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
377-382
DOI
10.4028/www.scientific.net/KEM.257-258.377
Citation
P. L. Tso, S.Y. Ho, "A Study on the Dressing Rate in CMP Pad Conditioning", Key Engineering Materials, Vols. 257-258, pp. 377-382, 2004
Online since
February 2004
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