Paper Title:
Pad Surface Characterization and its Effect on the Tribological State in Chemical Mechanical Polishing
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 257-258)
Edited by
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
383-388
DOI
10.4028/www.scientific.net/KEM.257-258.383
Citation
H. J. Kim, H. D. Jeong, E. Lee, Y. J. Shin, "Pad Surface Characterization and its Effect on the Tribological State in Chemical Mechanical Polishing", Key Engineering Materials, Vols. 257-258, pp. 383-388, 2004
Online since
February 2004
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Price
$32.00
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