Paper Title:
Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface
  Abstract

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Periodical
Key Engineering Materials (Volumes 257-258)
Edited by
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
39-44
DOI
10.4028/www.scientific.net/KEM.257-258.39
Citation
Q. L. Zhao, M. J. Chen, Y. C. Liang, S. Dong, K. Cheng, "Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface", Key Engineering Materials, Vols. 257-258, pp. 39-44, 2004
Online since
February 2004
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$32.00
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