Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface |
| Journal |
Key Engineering Materials (Volumes 257 - 258) |
| Volume |
Advances in Abrasive Technology VI |
| Edited by |
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa |
| Pages |
39-44 |
| DOI |
10.4028/www.scientific.net/KEM.257-258.39 |
| Citation |
Qing Liang Zhao et al., 2004, Key Engineering Materials, 257-258, 39 |
| Online since |
February, 2004 |
| Authors |
Qing Liang Zhao, Ming Jun Chen, Ying Chun Liang, Shen Dong, K. Cheng |
| Keywords |
Atomic Force Microscope (AFM), Diamond Tip, Micro Machining, Nanoindentation, Silicon |
| Full Paper |
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