Paper Title:
Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
  Abstract

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Periodical
Key Engineering Materials (Volumes 257-258)
Edited by
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
429-432
DOI
10.4028/www.scientific.net/KEM.257-258.429
Citation
K. Yoshitomi, A. Une, M. Mochida, "Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control", Key Engineering Materials, Vols. 257-258, pp. 429-432, 2004
Online since
February 2004
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Price
$32.00
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