Paper Title:
An Investigation on the 3D Micromachining Techniques Based on a SPM
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 257-258)
Edited by
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
465-472
DOI
10.4028/www.scientific.net/KEM.257-258.465
Citation
Y. D. Yan, T. Sun, S. Dong, Y. C. Liang, K. Cheng, "An Investigation on the 3D Micromachining Techniques Based on a SPM", Key Engineering Materials, Vols. 257-258, pp. 465-472, 2004
Online since
February 2004
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Price
$32.00
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