Characteristics of the Fine Grained CVD Diamond Film and its Industrial Applications |
| Journal |
Key Engineering Materials (Volumes 257 - 258) |
| Volume |
Advances in Abrasive Technology VI |
| Edited by |
Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa |
| Pages |
553-558 |
| DOI |
10.4028/www.scientific.net/KEM.257-258.553 |
| Citation |
K. Kazahaya et al., 2004, Key Engineering Materials, 257-258, 553 |
| Online since |
February, 2004 |
| Authors |
K. Kazahaya, A. Yamakawa, T. Fukunishi |
| Keywords |
Fine Grained Diamond Films, Tool for Semiconductor Package Processing |
| Full Paper |
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