Paper Title:
Study on the Surface Quality of LiNbO3 Wafer by CMP
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 259-260)
Edited by
Xipeng Xu
Pages
644-647
DOI
10.4028/www.scientific.net/KEM.259-260.644
Citation
T. Xing, J. L. Yuan, W. Li, S. M. Ji, L.B. Zhang, W. H. Zhao, "Study on the Surface Quality of LiNbO3 Wafer by CMP ", Key Engineering Materials, Vols. 259-260, pp. 644-647, 2004
Online since
March 2004
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