Prevention method of delamination at adhesive layer during drilling of composite material using vibration is examined. First, this method is examined experimentally. As vibrational load, relatively low frequency vibration and ultrasonic vibration are used. It is concluded occurrence of delamination is less when vibration is used during drilling. Next, experimental results are examined by analytical method. Adhesive layer is assumed to be damping component. Condition of occurrence of delamination is proposed.