Paper Title:
Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition
  Abstract

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Periodical
Key Engineering Materials (Volumes 264-268)
Main Theme
Edited by
Hasan Mandal and Lütfi Öveçoglu
Pages
459-464
DOI
10.4028/www.scientific.net/KEM.264-268.459
Citation
Y. Otani, S. Okamura, T. Shiosaki, "Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition ", Key Engineering Materials, Vols. 264-268, pp. 459-464, 2004
Online since
May 2004
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